Dichlorosilane (DCS) (SiH2Cl2)

Not quite sure?

Our expert team are here to help answer any questions you have and provide customised solutions. Send an enquiry today. 

Dichlorosilane (DCS) (SiH2Cl2)

Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH3 (i.e. 16:1), usually results in lower stress nitride films

Product Details

Each location, must be registerated separately
› Warranty Registration Number:
› Site Contact for end user:
› Installation Address
› Installation Details
› Commissioned
› Servicing Organised

Request a Quote